JPS6238869B2 - - Google Patents

Info

Publication number
JPS6238869B2
JPS6238869B2 JP53014232A JP1423278A JPS6238869B2 JP S6238869 B2 JPS6238869 B2 JP S6238869B2 JP 53014232 A JP53014232 A JP 53014232A JP 1423278 A JP1423278 A JP 1423278A JP S6238869 B2 JPS6238869 B2 JP S6238869B2
Authority
JP
Japan
Prior art keywords
silicon oxide
oxide layer
forming
phosphorus
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53014232A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54107270A (en
Inventor
Hideto Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP1423278A priority Critical patent/JPS54107270A/ja
Publication of JPS54107270A publication Critical patent/JPS54107270A/ja
Publication of JPS6238869B2 publication Critical patent/JPS6238869B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP1423278A 1978-02-10 1978-02-10 Semiconductor device and its production Granted JPS54107270A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1423278A JPS54107270A (en) 1978-02-10 1978-02-10 Semiconductor device and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1423278A JPS54107270A (en) 1978-02-10 1978-02-10 Semiconductor device and its production

Publications (2)

Publication Number Publication Date
JPS54107270A JPS54107270A (en) 1979-08-22
JPS6238869B2 true JPS6238869B2 (en]) 1987-08-20

Family

ID=11855317

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1423278A Granted JPS54107270A (en) 1978-02-10 1978-02-10 Semiconductor device and its production

Country Status (1)

Country Link
JP (1) JPS54107270A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63149877U (en]) * 1987-03-20 1988-10-03

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6107194A (en) * 1993-12-17 2000-08-22 Stmicroelectronics, Inc. Method of fabricating an integrated circuit
US6284584B1 (en) 1993-12-17 2001-09-04 Stmicroelectronics, Inc. Method of masking for periphery salicidation of active regions
US5439846A (en) * 1993-12-17 1995-08-08 Sgs-Thomson Microelectronics, Inc. Self-aligned method for forming contact with zero offset to gate

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5528434B2 (en]) * 1974-01-29 1980-07-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63149877U (en]) * 1987-03-20 1988-10-03

Also Published As

Publication number Publication date
JPS54107270A (en) 1979-08-22

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